Ptychographic imaging with partially coherent plasma EUV sources

Berlin ; Boston, Mass / De Gruyter (2017) [Journal Article]

Advanced Optical Technologies
Volume: 6
Issue: 6
Page(s): 459-466

Authors

Selected Authors

Biller, Jan
Juschkin, Larissa
Odstrčil, Michal
Teramoto, Yusuke

Identifier