Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

SPIE (2017) [Contribution to a book, Contribution to a conference proceedings]

[International Conference on Extreme Ultraviolet Lithography, 2017-09-11 - 2017-09-14, Monterey, California, USA]

Authors

Selected Authors

Bahrenberg, Lukas
Danylyuk, Serhiy
Brose, Sascha Manuel
Pollentier, Ivan
Timmermans, Marina

Other Authors

Gallagher, Emily
Stollenwerk, Jochen Hugo
Loosen, Peter

Identifier