Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

SPIE (2017) [Contribution to a book, Contribution to a conference proceedings]

International Conference on Extreme Ultraviolet Lithography 2017 : [Proceedings] - SPIE, 2017. - ISBN 97815106137449781510613751 - doi:10.1117/12.2280579

Authors

Selected Authors

Bahrenberg, Lukas
Danylyuk, Serhiy
Loosen, Peter
Brose, Sascha
Stollenwerk, Jochen

Other Authors

Gallagher, Emily
Pollentier, Ivan
Timmermans, Marina
Gargini, Paolo A.
Ronse, Kurt G.
Naulleau, Patrick P.
Itani, Toshiro

Identifier