Throughput scaling by spatial beam shaping and dynamic focusing

Bellingham,WA / SPIE (2017) [Buchbeitrag, Beitrag zu einem Tagungsband]

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII / edited by Beat Neuenschwander

Authors

Selected Authors

Kumkar, M.
Kaiser, M.
Kleiner, J.
Flamm, D.
Grossmann, D.

Other Authors

Bergner, K.
Zimmermann, F.
Nolte, S.

Identifier