Rapid nanostructuring using multi-beam-interference with consecutively overlapped ultrashort laser pulses

(2017) [Beitrag zu einem Tagungsband]

18th International Syposium on Laser Precision Microfabrication June 5-8, 2017, Toyama Japan. Toyama 2017-06-05 - 2017-06-08

Authors

Selected Authors

He, Chao
Steger, Michael
Gillner, Arnold

Identifier

  • REPORT NUMBER: RWTH-2017-07056