B.Sc. and M.Sc. Projects


We are sorry, if there are currently no thesis offers. However, we are always very happy about unsolicited applications. Please contact the contact persons for the different projects to discuss possible projects.



  Image of a EUV-Source with Controller and Chiller Fraunhofer ILT

B.Sc. (Physik) Projekt
Characterization of the Extreme Ultraviolet Spectrum of a Plasma based Light Source

Lithography and imaging application reqzure shorter and shorter illumination wavelength to satisfy the requirements of size reduction and resolution. One source of shorter wavelength are gas discharge plasma which emit in the EUV range between 1 nm and 50 nm. Within this project plasma characterization need to be conducted to find the best working gas and parameters for an intense emission of EUV radiation.

Project description Jan Bussmann